非晶态As2S8半导体薄膜波导的热处理效应
Zou Liner, Chen Baoxue, Du Liping, Liu Xiaoqing, Hamanaka H, Iso M
key words: amorphous chalcogenide semiconductor, As2S8 film waveguide, thermal machining effect, optical transmission
As2S8 planar waveguide: refractive index changes following an annealing and irradiation and annealing cycle, and light propagation features
Zou Liner, Wang Gouri, Shen Yun, Chen Baoxue, Mamoru Iso
doi: 10.1088/1674-4926/32/11/112004
key words: amorphous semiconductor chalcogenide, As2S8 waveguide, refractive index, light propagation