MIM capacitors with various Al2O3 thicknesses for GaAs RFIC application
Jiahui Zhou,
Hudong Chang,
Honggang Liu,
Guiming Liu,
Wenjun Xu,
Qi Li,
Simin Li,
Zhiyi He,
Haiou Li
doi: 10.1088/1674-4926/36/5/054004
key words:
MIM capacitors,
Al2O3,
thickness