The effect of δ-doping and modulation-doping on Si-doped high Al content n-AlxGa1-xN grown by MOCVD
Shaoxin Zhu,
Jianchang Yan,
Jianping Zeng,
Ning Zhang,
Zhao Si,
Peng Dong,
Jinmin Li,
Junxi Wang
doi: 10.1088/1674-4926/34/5/053004
key words:
n-AlxGa1-xN,
MOCVD,
δ-doping,
modulation-doping,
dopants diffusion