Effect of hydrogen on low temperature epitaxial growth of polycrystalline silicon by hot wire chemical vapor deposition

Yong Cao, Hailong Zhang, Fengzhen Liu, Meifang Zhu, Gangqiang Dong

doi: 10.1088/1674-4926/36/2/023004

key words: polycrystalline silicon, hot-wire chemical vapor deposition, low temperature epitaxial growth