衬底温度和氮气分压对氮化锌薄膜的性能影响

Zhang Jun, Xie Erqing, Fu Yujun, Li Hui, Shao Lexi

key words: zinc nitride, thin film, magnetron sputtering, electrical and optical properties

用于太阳电池吸收层的Cu2ZnSnS4薄膜的制备及其光电特性

Shao Lexi, Fu Yujun, Zhang Jun, He Deyan

key words: Cuz ZnSnS4, vacuum evaporation, sulfurization, solar cell

P-type ZnO thin films prepared by in situ oxidation of DC sputtered Zn3N2:Ga

Zhang Jun, Xue Shuwen, Shao Lexi

doi: 10.1088/1674-4926/31/4/043001

key words: p-type, ZnO films, Zn3N2 films, codoping, magnetron sputtering

ZnS/CuInS2/Mo/钠钙玻璃衬底上射频溅射ZnO∶Al薄膜的SEM研究

Shao Lexi, Liu Xiaoping, Hwang Hueyliang

key words: zinc oxide doped with aluminum thin film, radio frequency sputtering, scanning electron microscopy, ZnS/CuInS2/Mo/soda-lime glass substrate