半导体质量控制中的非正态工序能力指数计算模型

Wang Shaoxi, Jia Xinzhang

key words: non-normal distribution, process capability index, Chebyshev-Hermite polynomials, quality control

A multivariate process capability index model system

Wang Shaoxi, Wang Danghui

doi: 10.1088/1674-4926/32/1/016001

key words: microelectronics process, multivariate, process capability index, yield, factor weight

基于遗传算法的Kriging元模型及其在模拟集成电路优化设计中的应用

You Hailong, Jia Xinzhang, Wang Shaoxi

key words: analog IC, Kriging metamodel, optimization, genetic algorithms