A thin transition film formed by plasma exposure contributes to the germanium surface hydrophilicity
Shumei Lai,
Danfeng Mao,
Zhiwei Huang,
Yihong Xu,
Songyan Chen,
Cheng Li,
Wei Huang,
Dingliang Tang
doi: 10.1088/1674-4926/37/9/093004
key words:
surface hydrophilicity,
contact angle,
plasma,
GeOxNy,
GeOx