Line-edge roughness induced single event transient variation in SOI FinFETs
Weikang Wu,
Xia An,
Xiaobo Jiang,
Yehua Chen,
Jingjing Liu,
Xing Zhang,
Ru Huang
doi: 10.1088/1674-4926/36/11/114001
key words:
heavy ion irradiation,
single event transient,
variation,
line-edge roughness,
SOI,
FinFET