Comprehensive study of crystalline AlN/sapphire templates after high-temperature annealing with various sputtering conditions
Wen Gu,
Zhibin Liu,
Yanan Guo,
Xiaodong Wang,
Xiaolong Jia,
Xingfang Liu,
Yiping Zeng,
Junxi Wang,
Jinmin Li,
Jianchang Yan
doi: 10.1088/1674-4926/41/12/122802
key words:
sputter,
annealing,
AlN,
dislocation density
