底栅和顶栅结构全透明氧化锌薄膜晶体管的制备

Zhang Xin’an, Zhang Jingwen, Zhang Weifeng, Wang Dong, Bi Zhen, Bian Xuming, Hou Xun

key words: zinc oxide, thin film transistor, structure, interface

LMBE法生长Mg0.2Zn0.8O及MSM型紫外探测器的制备

Bi Zhen, Zhang Jingwen, Bian Xuming, Wang Dong, Zhang Xin'+C143an, Hou Xun

key words: Mg0.2Zn0.8O film, ultraviolet photodetector, response time

L-MBE法制备以ZnO为沟道层的薄膜晶体管

Zhang Xin’an, Zhang Jingwen, Yang Xiaodong, Lou Hui, 刘振玲 , Liu Zhenling, Zhang Weifeng

key words: L-MBE, ZnO thin films, thin film transistor

背照式ZnO紫外焦平面成像阵列制作的刻蚀研究

Gao Qun, Zhang Jingwen, Hou Xun

key words: etching, NH4Cl, focal plane array