微加工工艺应力的喇曼在线测量
Sang Shengbo, Xue Chenyang, Zhang Wendong, Xiong Jijun, Ruan Yong, Zhang Dacheng, Hao Yilong
key words: micromachining, residual stress, Raman, online-measurement
共振隧穿二极管的压阻特性测试与研究
Mao Haiyang, Xiong Jijun, Zhang Wendong, Xue Chenyang, Sang Shengbo, Bao Aida
key words: resonant tunneling diode, piezoresistive property, coherence, sensitivity, Raman spectrum
双势垒量子阱薄膜力电耦合特性实验
Xie Bin, Xue Chenyang, Zhang Wendong, Xiong Jijun, Zhang Binzhen
key words: nano electro-mechanical system, mechanical-electrical coupling, uniaxial pressure, double-barrier quantum well
基于共振隧穿二极管的应力检测方法
Xiong Jijun, Mao Haiyang, Zhang Wendong, Xue Chenyang
key words: current-voltage characteristic, oscillation frequency, piezoresistive sensitivity, resonant tunneling diode, stress measurement
基于SiCl4/SF6的GaAs/AlAs ICP选择性干法刻蚀
Tong Zhaomin, Xue Chenyang, Zhang Binzhen, Wang Yong, Zhang Wendong, Zhang Xiongwen
key words: GaAs/AlAs, ICP, selective dry etching, SiCl4/SF6
Raman scattering studies on PZT thin films for trigonal–tetragonal phase transition
Liang Ting, Li Junhong, Du Wenlong, Xue Chenyang, Zhang Wendong
doi: 10.1088/1674-4926/30/8/083001
key words: PZT
Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology
Du Chunhui, He Changde, Yu Jiaqi, Ge Xiaoyang, Zhang Yongping, Zhang Wendong
doi: 10.1088/1674-4926/33/10/104005
key words: cross-axis sensitivity, piezoresistive, symmetric distribution, triaxial accelerometer
