p型微晶硅薄膜的沉积及其在微晶硅薄膜太阳电池中的应用

Chen Yongsheng, Yang Shi'e, Wang Jianhua, Lu Jingxiao, Gao Xiaoyong, Gu Jinhua, Zheng Wen, Zhao Shangli

key words: boron-doped μc-Si:H films, Raman crystallinity, dark conductivity, solar cells