采用铟束流保护下的调制中断生长技术改善(0001)GaN表面形貌

Zhong Fei, Qiu Kai, Li Xinhua, Yin Zhijun, Ji Changjian, Han Qifeng, Cao Xiancun, Chen Jiarong, Duan Chenghong, Zhou Xiuju, Wang Yuqi

key words: growth interruption modulation, surface morphology, GaN film