The influence of Fe doping on the surface topography of GaN epitaxial material
Lei Cui,
Haibo Yin,
Lijuan Jiang,
Quan Wang,
Chun Feng,
Hongling Xiao,
Cuimei Wang,
Jiamin Gong,
Bo Zhang,
Baiquan Li,
Xiaoliang Wang,
Zhanguo Wang
doi: 10.1088/1674-4926/36/10/103002
key words:
Fe doping,
GaN,
MOCVD,
surface topography