氢氟酸和PSG牺牲层腐蚀的TDC模型

Wu Changju, Wang Hao, Jin Zhonghe, Ma Huilian, Wang Yuelin

key words: diffusion coefficient, etching rate, sacrificial oxide, TDC model

静压驱动下微流体的流动特性

Wu Changju, Jin Xiaojun, Jin Zhonghe, Wang Yuelin

key words: microfluid, flow characteristics, hydrostatic pressure, viscosity

Bubble结构牺牲层腐蚀的一种改进模型

Wu Changju, Ma Huilian, Jin Zhonghe, Wang Yuelin

key words: MEMS, sacrificial layer etching, etching rate coefficient, diffusion coefficient

宽度比对组合沟道结构牺牲层腐蚀特性的影响

Wu Changju, Jin Zhonghe, Wang Yuelin

key words: joint channel, width ratio, etching rate