用于紫外探测器的AlGaN/GaN异质结构的Ti/Al/Ni/Au欧姆接触特性

Zhang Junqin, Yang Yintang, Chai Changchun, Li Yuejin, Jia Hujun

key words: AlGaN/GaN, ohmic contact, specific contact resistivity, transmission line method, Ti/Al/Ni/Au, ultraviolet detectors