Chin. J. Semicond. > Volume 17 > Issue 7 > Article Number: 518

电子束辐照对InP(100)表面硫钝化的增强作用

陈维德,李秀琼,段俐宏,谢小龙

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Abstract: 采用含有过量硫的(NH4)2Sx对InP(100)表面进行化学钝化和辉光放电电子束辐照处理,液氮下光致发光强度比未辐照的光致发光强度提高了1.5倍,比未钝化的提高了5倍.利用X射线光电子谱研究了电子辐照对InP表面硫钝化的影响.结果表明,硫钝化InP表面经电子束辐照可以促使S与InP中的In更好的化合.

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History

Manuscript received: 18 August 2015 Manuscript revised: Online: Published: 01 July 1996

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