Chin. J. Semicond. > Volume 19 > Issue 11 > Article Number: 841

有机材料衬底ITO透明导电膜的结构和导电特性研究

马瑾 , 赵俊卿 , 李淑英 and 马洪磊

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Abstract: 采用真空反应蒸发技术,蒸发高纯度铟锡合金,在有机薄膜基片上制备出高质量的ITO透明导电薄膜.研究了薄膜结构及电阻率、载流子浓度和迁移率等电学参数对制备条件的依赖关系.对制备薄膜的导电机制进行了研究

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History

Manuscript received: 18 August 2015 Manuscript revised: Online: Published: 01 November 1998

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