Chin. J. Semicond. > Volume 1 > Issue 1 > Article Number: 37

一种显示N~+-GaAs多种缺陷的阳极腐蚀法

曹福年

+ Author Affiliations + Find other works by these authors

PDF

Abstract: 本文描述一种电解液为KOH水溶液的阳极腐蚀法.通过与一些有效的缺陷显示化学腐蚀剂对照,证实此法能显示N~+-GaAs任何取向平面的生长条纹、位错和碟形坑等多种缺陷.这些碟形坑可能与存在于晶体中的层错环有关系.

Search

Advanced Search >>

Article Metrics

Article views: 3362 Times PDF downloads: 4931 Times Cited by: 0 Times

History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 January 1980

Email This Article

User name:
Email:*请输入正确邮箱
Code:*验证码错误