Chin. J. Semicond. > Volume 10 > Issue 12 > Article Number: 930

半导体3-D磁敏器件的设计与分析

刘亿 and 赖宗声

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Abstract: 本文将普通的双极型IC工艺用干磁敏器件的制作中,成功地研制了一种新型三维磁敏晶体管,并在理论和实验上分析讨论了其灵敏度、线性度和失调等问题.用该方法制作的器件对B_x分量的灵敏度S_(xx)较国外文献报道的高一个数量级.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 December 1989

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