Qingqing Wang, Yun Zheng, Chonghao Zhai, Xudong Li, Qihuang Gong, Jianwei Wang. Chip-based quantum communications[J]. Journal of Semiconductors, 2021, 42(9): 091901. doi: 10.1088/1674-4926/42/9/091901.
Q Q Wang, Y Zheng, C H Zhai, X D Li, Q H Gong, J W Wang, Chip-based quantum communications[J]. J. Semicond., 2021, 42(9): 091901. doi: 10.1088/1674-4926/42/9/091901.
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Avalanche photodiode (APD) is a kind of photodetector with important applications in optical communication, LIDAR and other fields. APDs fabricated using the recently developed AlGaAsSb as the multiplication material exhibit excellent noise performance. In this work, we report a low-noise separate absorption, grading, charge, and multiplication (SAGCM) InGaAs/AlGaAsSb APD operating at 1550 nm. A double-mesa structure was fabricated to reduce the dark current. Numerical simulations were conducted to compare two different mesa-structured APDs. By analyzing the electric field distribution, it was found that the electric field at the edge of the multiplication region in the double-mesa APD is nearly 100 kV/cm lower than that of the single-mesa structure. Experimental results demonstrate that after device punch-through, the double-mesa APD’s dark current can be reduced by up to four times compared to the single-mesa APD. Quantitative analysis of the dark current components in the AlGaAsSb APD further confirms that the low sidewall electric field in the double-mesa structure effectively suppresses the trap-assisted tunneling. Additionally, noise measurements indicate a k-value of approximately 0.014, which is significantly lower than that of traditional multiplication materials. This work provides preliminary validation for further performance improvements in low noise and low dark current AlGaAsSb APDs.