| Citation: |
Xiao Dingbang, Wu Xuezhong, Hou Zhanqiang, Chen Zhihua, Dong Peitao, Li Shengyi. High-performance micromachined gyroscope with a slanted suspension cantilever[J]. Journal of Semiconductors, 2009, 30(4): 044012. doi: 10.1088/1674-4926/30/4/044012
Xiao D B, Wu X Z, Hou Z Q, Chen Z H, Dong P T, Li S Y. High-performance micromachined gyroscope with a slanted suspension cantilever[J]. J. Semicond., 2009, 30(4): 044012. doi: 10.1088/1674-4926/30/4/044012.
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High-performance micromachined gyroscope with a slanted suspension cantilever
doi: 10.1088/1674-4926/30/4/044012
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Abstract
This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechani-cal noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of ±100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.-
Keywords:
- micromachined gyroscope
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References
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