SEMICONDUCTOR DEVICES

A compressed wide period-tunable grating working at low voltage

Liu Xiang, Li Tie, Ming Anjie and Wang Yuelin

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Abstract: A MEMS compressed period-tunable grating device with a wide tuning range has been designed, fabricated and characterized. To increase the tuning range, avoid instability with tuning and improve the performance, we propose in this paper a period-tunable grating which is compressed by large-displacement comb actuators with tilted folded beams. The experimental results show that the designed grating device has a compression range of up to 144 μm within 37 V driving voltage. The period of the grating can be adjusted continuously from 16 to 14 μm with a tuning range of 12.5%. The maximum tuning range of the first-order diffraction angle is 0.34o at 632.8 nm and the reflectivity of the grating is more than 92.6% in the mid-infrared region. The grating device can be fabricated by simple processes and finds applications in mid-infrared spectrometers.

Key words: period-tunable gratingcompressed structurecomb-drive actuatorMEMS

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    Received: 18 August 2015 Revised: 04 June 2010 Online: Published: 01 October 2010

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      Liu Xiang, Li Tie, Ming Anjie, Wang Yuelin. A compressed wide period-tunable grating working at low voltage[J]. Journal of Semiconductors, 2010, 31(10): 104010. doi: 10.1088/1674-4926/31/10/104010 Liu X, Li T, Ming A J, Wang Y L. A compressed wide period-tunable grating working at low voltage[J]. J. Semicond., 2010, 31(10): 104010. doi:  10.1088/1674-4926/31/10/104010.Export: BibTex EndNote
      Citation:
      Liu Xiang, Li Tie, Ming Anjie, Wang Yuelin. A compressed wide period-tunable grating working at low voltage[J]. Journal of Semiconductors, 2010, 31(10): 104010. doi: 10.1088/1674-4926/31/10/104010

      Liu X, Li T, Ming A J, Wang Y L. A compressed wide period-tunable grating working at low voltage[J]. J. Semicond., 2010, 31(10): 104010. doi:  10.1088/1674-4926/31/10/104010.
      Export: BibTex EndNote

      A compressed wide period-tunable grating working at low voltage

      doi: 10.1088/1674-4926/31/10/104010
      • Received Date: 2015-08-18
      • Accepted Date: 2010-03-15
      • Revised Date: 2010-06-04
      • Published Date: 2010-10-05

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