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Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors

Fakhra Aziz, M. H. Sayyad, Khassan S. Karimov, M. Saleem, Zubair Ahmad and S. Mahmood Khan

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Abstract: This study presents the fabrication and characterization of novel surface-type capacitive humidity sensors using vanadyl phthalocyanine (VOPc) as the active material. The devices, which comprise three different thicknesses, have been fabricated using a thermal evaporator. A thin film of VOPc is deposited on thoroughly cleaned glass substrates with pre-patterned Ag electrodes. The capacitive effect of the samples under humidity has been investigated. Comparison of the samples with different thicknesses shows that the thinnest device seems more sensitive towards humidity. The humidity dependent capacitance properties of the sensor make it beneficial for use in commercial hygrometers.

Key words: surface-type, capacitance, vanadyl phthalocyanine, humidity sensor, organic semiconductor.

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    Received: 18 August 2015 Revised: 30 June 2010 Online: Published: 01 November 2010

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      Fakhra Aziz, M. H. Sayyad, Khassan S. Karimov, M. Saleem, Zubair Ahmad, S. Mahmood Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. Journal of Semiconductors, 2010, 31(11): 114002. doi: 10.1088/1674-4926/31/11/114002 F Aziz, M H Sayyad, K S Karimov, M Saleem, Z Ahmad, S M Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. J. Semicond., 2010, 31(11): 114002. doi:  10.1088/1674-4926/31/11/114002.Export: BibTex EndNote
      Citation:
      Fakhra Aziz, M. H. Sayyad, Khassan S. Karimov, M. Saleem, Zubair Ahmad, S. Mahmood Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. Journal of Semiconductors, 2010, 31(11): 114002. doi: 10.1088/1674-4926/31/11/114002

      F Aziz, M H Sayyad, K S Karimov, M Saleem, Z Ahmad, S M Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. J. Semicond., 2010, 31(11): 114002. doi:  10.1088/1674-4926/31/11/114002.
      Export: BibTex EndNote

      Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors

      doi: 10.1088/1674-4926/31/11/114002
      • Received Date: 2015-08-18
      • Accepted Date: 2010-03-31
      • Revised Date: 2010-06-30
      • Published Date: 2010-10-31

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