SEMICONDUCTOR INTEGRATED CIRCUITS

SOI-based radial-contour-mode micromechanical disk resonator

Jia Yingqian, Zhao Zhengping, Yang Yongjun, Hu Xiaodong and Li Qian

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Abstract: This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding. The gap between the disk and the surrounding gold electrodes is 100 nm. The radius of the disk is 20 μm and the thickness is 4.5 μm. In results, the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum.

Key words: RF-MEMS

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    Received: 20 August 2015 Revised: 19 May 2011 Online: Published: 01 November 2011

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      Jia Yingqian, Zhao Zhengping, Yang Yongjun, Hu Xiaodong, Li Qian. SOI-based radial-contour-mode micromechanical disk resonator[J]. Journal of Semiconductors, 2011, 32(11): 115001. doi: 10.1088/1674-4926/32/11/115001 Jia Y Q, Zhao Z P, Yang Y J, Hu X D, Li Q. SOI-based radial-contour-mode micromechanical disk resonator[J]. J. Semicond., 2011, 32(11): 115001. doi: 10.1088/1674-4926/32/11/115001.Export: BibTex EndNote
      Citation:
      Jia Yingqian, Zhao Zhengping, Yang Yongjun, Hu Xiaodong, Li Qian. SOI-based radial-contour-mode micromechanical disk resonator[J]. Journal of Semiconductors, 2011, 32(11): 115001. doi: 10.1088/1674-4926/32/11/115001

      Jia Y Q, Zhao Z P, Yang Y J, Hu X D, Li Q. SOI-based radial-contour-mode micromechanical disk resonator[J]. J. Semicond., 2011, 32(11): 115001. doi: 10.1088/1674-4926/32/11/115001.
      Export: BibTex EndNote

      SOI-based radial-contour-mode micromechanical disk resonator

      doi: 10.1088/1674-4926/32/11/115001
      • Received Date: 2015-08-20
      • Accepted Date: 2011-05-06
      • Revised Date: 2011-05-19
      • Published Date: 2011-10-20

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