SEMICONDUCTOR INTEGRATED CIRCUITS

High resolution interface circuit for closed-loop accelerometer

Yin Liang, Liu Xiaowei, Chen Weiping and Zhou Zhiping

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Abstract: This paper reports a low noise switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer. The time division multiplexing of the same electrode is adopted to avoid the strong feedthrough between capacitance sensing and electrostatic force feedback. A PID controller is designed to ensure the stability and dynamic response of a high Q closed-loop accelerometer with a vacuum package. The architecture only requires single ended operational amplifiers, transmission gates and capacitors. Test results show that a full scale acceleration of ± 3 g, non-linearity of 0.05% and signal bandwidth of 1000 Hz are achieved. The complete module operates from a ± 5 V supply and has a measured sensitivity of 1.2 V/g with a noise of floor of 0.8 μg/√Hz in closed-loop. The chip is fabricated in the 2 μm two-metal and two-poly n-well CMOS process with an area of 15.2 mm2. These results prove that this circuit is suitable for high performance micro-accelerometer applications like seismic detection and oil exploration.

Key words: closed-loop accelerometerinterface circuitswitched capacitorlow noise

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    Received: 18 August 2015 Revised: 25 November 2010 Online: Published: 01 April 2011

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      Yin Liang, Liu Xiaowei, Chen Weiping, Zhou Zhiping. High resolution interface circuit for closed-loop accelerometer[J]. Journal of Semiconductors, 2011, 32(4): 045005. doi: 10.1088/1674-4926/32/4/045005 Yin L, Liu X W, Chen W P, Zhou Z P. High resolution interface circuit for closed-loop accelerometer[J]. J. Semicond., 2011, 32(4): 045005. doi: 10.1088/1674-4926/32/4/045005.Export: BibTex EndNote
      Citation:
      Yin Liang, Liu Xiaowei, Chen Weiping, Zhou Zhiping. High resolution interface circuit for closed-loop accelerometer[J]. Journal of Semiconductors, 2011, 32(4): 045005. doi: 10.1088/1674-4926/32/4/045005

      Yin L, Liu X W, Chen W P, Zhou Z P. High resolution interface circuit for closed-loop accelerometer[J]. J. Semicond., 2011, 32(4): 045005. doi: 10.1088/1674-4926/32/4/045005.
      Export: BibTex EndNote

      High resolution interface circuit for closed-loop accelerometer

      doi: 10.1088/1674-4926/32/4/045005
      • Received Date: 2015-08-18
      • Accepted Date: 2010-09-03
      • Revised Date: 2010-11-25
      • Published Date: 2011-03-22

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