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Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities

Zhang Jiashun, Wang Yue, Wu Yuanda, Zhang Xiaoguang, Jiang Ting, An Junming, Li Jianguang, Wang Hongjie and Hu Xiongwei

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Abstract: H5 photonic crystal (PC) microcavities co-implanted with erbium (Er) and oxygen (O) ions were fabricated on silicon-on-insulator (SOI) wafers. Photoluminescence (PL) measurements were taken at room temperature and a light extraction enhancement of up to 12 was obtained at 1.54 μm, as compared to an identically implanted unpatterned SOI wafer. In addition, we also explored the adjustment of cavity modes by changing the structural parameters of the PC, and the measured results showed that the cavity-resonant peaks shifted towards shorter wavelengths as the radius of the air holes increased, which is consistent with the theoretical simulation.

Key words: light extractionerbium/oxygen co-implantationphotonic crystal microcavitySOIphotoluminescence

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    Received: 21 August 2015 Revised: 28 April 2011 Online: Published: 01 September 2011

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      Zhang Jiashun, Wang Yue, Wu Yuanda, Zhang Xiaoguang, Jiang Ting, An Junming, Li Jianguang, Wang Hongjie, Hu Xiongwei. Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities[J]. Journal of Semiconductors, 2011, 32(9): 094004. doi: 10.1088/1674-4926/32/9/094004 Zhang J S, Wang Y, Wu Yuanda, Zhang X G, Jiang T, An J M, Li J G, Wang H J, Hu X W. Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities[J]. J. Semicond., 2011, 32(9): 094004. doi: 10.1088/1674-4926/32/9/094004.Export: BibTex EndNote
      Citation:
      Zhang Jiashun, Wang Yue, Wu Yuanda, Zhang Xiaoguang, Jiang Ting, An Junming, Li Jianguang, Wang Hongjie, Hu Xiongwei. Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities[J]. Journal of Semiconductors, 2011, 32(9): 094004. doi: 10.1088/1674-4926/32/9/094004

      Zhang J S, Wang Y, Wu Yuanda, Zhang X G, Jiang T, An J M, Li J G, Wang H J, Hu X W. Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities[J]. J. Semicond., 2011, 32(9): 094004. doi: 10.1088/1674-4926/32/9/094004.
      Export: BibTex EndNote

      Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities

      doi: 10.1088/1674-4926/32/9/094004
      • Received Date: 2015-08-21
      • Accepted Date: 2010-10-12
      • Revised Date: 2011-04-28
      • Published Date: 2011-08-31

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