| Citation: |
Zhang Fengxin, Zhu Yinfang, Yang Jinling, Cao Lixin. Sensitive detection of infrared photons using a high-Q microcantilever[J]. Journal of Semiconductors, 2011, 32(9): 094010. doi: 10.1088/1674-4926/32/9/094010
Zhang F X, Zhu Y F, Yang J L, Cao L X. Sensitive detection of infrared photons using a high-Q microcantilever[J]. J. Semicond., 2011, 32(9): 094010. doi: 10.1088/1674-4926/32/9/094010.
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Sensitive detection of infrared photons using a high-Q microcantilever
doi: 10.1088/1674-4926/32/9/094010
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Abstract
A new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force. The irradiating light is modulated into sinusoidal and pulsed waves, and to be in-phase and anti-phase with the cantilever driving signal. A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed. Under a vacuum of 10-4 Pa, an infrared light power of 7.4 nW was detected with the cantilever. The in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.-
Keywords:
- infrared photon detection,
- light pressure force,
- cantilever
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References
[1] [2] [3] [4] [5] [6] [7] [8] [9] [10] [11] [12] [13] [14] -
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