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Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator

Wang Yuhai, Qin Zhengkun, Wang Chunxu and Wang Lizhong

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Abstract: The effects of manufacturing errors on transmission characteristics are analyzed for a polymer vertical coupling microring resonator. Calculated results show that the errors cause a shift and shape change of the transmission spectrum compared to the designed case without errors. Furthermore, accumulation and compensation for the errors is researched. In order to realize the normal filtering for the fabricated microring resonator device, some allowed errors are discussed.

Key words: microring resonatormanufacturing errorpolymertransmission spectrum

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    Received: 20 August 2015 Revised: 23 April 2012 Online: Published: 01 October 2012

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      Wang Yuhai, Qin Zhengkun, Wang Chunxu, Wang Lizhong. Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator[J]. Journal of Semiconductors, 2012, 33(10): 104007. doi: 10.1088/1674-4926/33/10/104007 Wang Y H, Qin Z K, Wang C X, Wang L Z. Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator[J]. J. Semicond., 2012, 33(10): 104007. doi: 10.1088/1674-4926/33/10/104007.Export: BibTex EndNote
      Citation:
      Wang Yuhai, Qin Zhengkun, Wang Chunxu, Wang Lizhong. Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator[J]. Journal of Semiconductors, 2012, 33(10): 104007. doi: 10.1088/1674-4926/33/10/104007

      Wang Y H, Qin Z K, Wang C X, Wang L Z. Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator[J]. J. Semicond., 2012, 33(10): 104007. doi: 10.1088/1674-4926/33/10/104007.
      Export: BibTex EndNote

      Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator

      doi: 10.1088/1674-4926/33/10/104007
      Funds:

      the Science and Technology Development of Jilin Province

      • Received Date: 2015-08-20
      • Accepted Date: 2012-03-18
      • Revised Date: 2012-04-23
      • Published Date: 2012-09-10

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