Fig. 1.
Three-dimensional views of the accelerometer. (a) Full view. (b) Partial-section view.
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Yongping Zhang, Changde He, Jiaqi Yu, Chunhui Du, Juanting Zhang, Xiujian Chou, Wendong Zhang. An integrated MEMS piezoresistive tri-axis accelerometer[J]. Journal of Semiconductors, 2013, 34(10): 104009. doi: 10.1088/1674-4926/34/10/104009
Y P Zhang, C D He, J Q Yu, C H Du, J T Zhang, X J Chou, W D Zhang. An integrated MEMS piezoresistive tri-axis accelerometer[J]. J. Semicond., 2013, 34(10): 104009. doi: 10.1088/1674-4926/34/10/104009.
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An integrated MEMS piezoresistive tri-axis accelerometer
doi: 10.1088/1674-4926/34/10/104009
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Abstract
An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to compose three Wheatstone bridges that are sensitive to the only given orientation. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, cross-axis-coupling degree, and linearity are presented. The sensitivity of X, Y and Z were 5.49 mV/g, 5.12 mV/g and 4.82 mV/g, respectively; the nonlinearity of X, Y and Z were 0.01%, 0.04% and 0.01%, respectively; the cross-axis-coupling factor of X axis to Y axis and Z axis are 0.119% and 2.26%; the cross-axis-coupling factor of Y axis to X axis and Z axis are 0.157% and 4.12%; the cross-axis-coupling factor of Z axis to X axis and Y axis are 0.511% and 0.938%. The measured performance indexes attain accurate vector-detection in practical applications, and even at a navigation level. In conclusion, the accelerometer is a highly integrated sensor.-
Keywords:
- accelerometer,
- integration,
- piezoresistive,
- tri-axis,
- MEMS
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References
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