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Enhanced electroluminescence from a free-standing tensilely strained germanium nanomembrane light-emitting diode

Jingming Chen, Bin Shu, Jibao Wu, Linxi Fan, Heming Zhang, Huiyong Hu, Rongxi Xuan and Jianjun Song

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Abstract: Ge has become a promising material for Si-based optoelectronic integrated circuits (OEIC) due to its pseudo-direct bandgap.In this paper we achieved tensilely strained Ge free-standing nanomembrane (NM) lightemitting diode (LED), using silicon nitride thin film with high stress.The tensile stress in the Ge layer can be controlled by adjustable process parameters.An expected redshift of electroluminescence (EL) in Ge NM LED is observed at room temperature, which has been attributed to the shrinking of its direct bandgap relative to its indirect bandgap.An EL with dramatically increased intensity was observed around 1876 nm at a tensile strain of 1.92%, which demonstrates the direct-band recombination in tensilely strained Ge NM.

Key words: electroluminescencelight-emitting diodestensilely strained germaniumfree-standing nanomembrane



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Fig. 1.  (Color online) Schematic of the cross-section of prepared device structure.

Fig. 2.  (Color online) Process flow of the Ge NM LED.

Fig. 3.  EL spectra from 0.36{\%},0.66{\%},1.05{\%},1.78{\%},and1.92{\%} strained Ge free-standing NM LED. The vertical axis is in arbitrary units. A 1.92{\%} stained Ge LED shows a 274 nm redshift of the center wavelength compared to the 0.36{\%} strained Ge LED.

Fig. 4.  (Color online) Symbols,peak emission energies obtained from the EL spectra of Figure 2,plotted as a function of strain. Lines,calculated bandgap energies between the $\Gamma $ or $L$ conduction-band minima and the HH or LH valence-band maxima.

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    Received: 05 March 2015 Revised: Online: Published: 01 October 2015

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      Jingming Chen, Bin Shu, Jibao Wu, Linxi Fan, Heming Zhang, Huiyong Hu, Rongxi Xuan, Jianjun Song. Enhanced electroluminescence from a free-standing tensilely strained germanium nanomembrane light-emitting diode[J]. Journal of Semiconductors, 2015, 36(10): 104004. doi: 10.1088/1674-4926/36/10/104004 J M Chen, B Shu, J B Wu, L X Fan, H M Zhang, H Y Hu, R X Xuan, J J Song. Enhanced electroluminescence from a free-standing tensilely strained germanium nanomembrane light-emitting diode[J]. J. Semicond., 2015, 36(10): 104004. doi: 10.1088/1674-4926/36/10/104004.Export: BibTex EndNote
      Citation:
      Jingming Chen, Bin Shu, Jibao Wu, Linxi Fan, Heming Zhang, Huiyong Hu, Rongxi Xuan, Jianjun Song. Enhanced electroluminescence from a free-standing tensilely strained germanium nanomembrane light-emitting diode[J]. Journal of Semiconductors, 2015, 36(10): 104004. doi: 10.1088/1674-4926/36/10/104004

      J M Chen, B Shu, J B Wu, L X Fan, H M Zhang, H Y Hu, R X Xuan, J J Song. Enhanced electroluminescence from a free-standing tensilely strained germanium nanomembrane light-emitting diode[J]. J. Semicond., 2015, 36(10): 104004. doi: 10.1088/1674-4926/36/10/104004.
      Export: BibTex EndNote

      Enhanced electroluminescence from a free-standing tensilely strained germanium nanomembrane light-emitting diode

      doi: 10.1088/1674-4926/36/10/104004
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      Project supported by the Fundamental Research Funds for the Central University of China (No.7214428001).

      • Received Date: 2015-03-05
      • Accepted Date: 2015-04-12
      • Published Date: 2015-01-25

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