J. Semicond. > 2015, Volume 36 > Issue 8 > 084005, doi: 10.1088/1674-4926/36/8/084005
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SEMICONDUCTOR DEVICES

Monolithic integration of a 16-channel VMUX on SOI platform

Pei Yuan, Yuanda Wu, Yue Wang, Junming An and Xiongwei Hu

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 Corresponding author: Pei Yuan, Email: yuanpei@semi.ac.cn

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Abstract: A 16-channel variable attenuator multiplexer/demultiplexer (VMUX) device is demonstrated. The VMUX is based on a rib-type structure on a silicon-on-insulator (SOI) platform. It consists of a 100-GHz arrayed waveguide grating (AWG) and an electro-optic variable optical attenuator (VOA) array with a p-i-n lateral diode structure. The insertion loss of the demonstrated device is about 9.1 dB and the corresponding crosstalk is about 10 dB. The injected current of the VOA is 60.74 mA at 20 dB attenuation and the whole area of the device is 2.9 × 1 mm2. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.

Key words: AWG, VOA, SOI, monolithic integration, planar lightwave circuit (PLC)



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Fig. 1.  (a) The overall mask layout of the VMUX. (b) The top view of the VOA. (c) The cross-sectional view of the VOA.

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Fig. 2.  The dependence of static normalized optical output power on doping-zone distance at different doping depth.

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Fig. 3.  The fabrication process.

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Fig. 4.  The micrographs of (a) arrayed waveguides of AWG and (b) the electrodes of VOAs.

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Fig. 5.  (Color online) The static transmission spectrum of VMUX. The input polarization is TE.

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Fig. 6.  (Color online) The transmission spectrum of VMUX with voltage applied on VOAs (0, 3, 6, 9 dB attenuated respectively for each group).

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Fig. 7.  The dependence of the attenuation on the injected current.

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Table 1.   Design parameters of 16-channel AWG.

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Table 2.   Design parameters of VOA.

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    Received: 10 January 2015 Revised: Online: Published: 01 August 2015

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      Article Navigation >  Journal of Semiconductors  > 2015  >  36(8): 084005
      Pei Yuan, Yuanda Wu, Yue Wang, Junming An, Xiongwei Hu. Monolithic integration of a 16-channel VMUX on SOI platform[J]. Journal of Semiconductors, 2015, 36(8): 084005. doi: 10.1088/1674-4926/36/8/084005 P Yuan, Y D Wu, Y Wang, J M An, X W Hu. Monolithic integration of a 16-channel VMUX on SOI platform[J]. J. Semicond., 2015, 36(8): 084005. doi: 10.1088/1674-4926/36/8/084005.Export: BibTex EndNote
      Citation:
      Pei Yuan, Yuanda Wu, Yue Wang, Junming An, Xiongwei Hu. Monolithic integration of a 16-channel VMUX on SOI platform[J]. Journal of Semiconductors, 2015, 36(8): 084005. doi: 10.1088/1674-4926/36/8/084005

      P Yuan, Y D Wu, Y Wang, J M An, X W Hu. Monolithic integration of a 16-channel VMUX on SOI platform[J]. J. Semicond., 2015, 36(8): 084005. doi: 10.1088/1674-4926/36/8/084005.
      Export: BibTex EndNote
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      Monolithic integration of a 16-channel VMUX on SOI platform

      doi: 10.1088/1674-4926/36/8/084005

      • State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

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      Project supported by the National High Technology Research and Development Program of China (No. 2013AA031402).

      More Information
      • Corresponding author: Email: yuanpei@semi.ac.cn
      • Received Date: 2015-01-10
      • Accepted Date: 2015-03-07
      • Published Date: 2015-01-25

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