SEMICONDUCTOR MATERIALS

Catalyst-free growth of ZnO nanowires on various-oriented sapphire substrates by pulsed-laser deposition

Tetsuya Shimogaki, Masahiro Takahashi, Masaaki Yamasaki, Taichi Fukuda, Mitsuhiro Higashihata, Hiroshi Ikenoue, Daisuke Nakamura and Tatsuo Okada

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 Corresponding author: Tetsuya Shimogaki, Email: shimogaki@laserlab.ees.kyushu-u.ac.jp

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Abstract: Catalyst-free growth of one-dimensional zinc oxide (ZnO) nanowires is reported. ZnO nanowires were synthesized on ZnO buffer layers deposited on various-oriented sapphire substrates. Syntheses of ZnO buffer layers and nanowires were performed by ultraviolet pulsed-laser deposition. ZnO nanowire's number density was the lowest in the case of using m-cut sapphire substrates. ZnO nanowires grown on a-cut sapphire substrates had vertical alignment with distances of tens to hundreds of nanometers. On the other hand, ZnO nanowires grown on c-cut sapphire substrates had the biggest nucleation rate. The dependence of crystalline orientation of ZnO buffer layers on the orientation of sapphire substrates were investigated by electron back scatter diffraction measurement. From their results, the growth models of ZnO buffer layers were suggested and the variations in morphological properties of ZnO nanowires were discussed.

Key words: zinc oxidenanowirecatalyst free growthpulsed laser deposition



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Fig. 1.  (Color online) Procedure of fabricating ZnO nanowires on sapphire substrates by NAPLD.

Fig. 2.  Schematic illustration of crystalline orientations of sapphire substrates used in this paper.

Fig. 3.  SEM images of ZnO buffer layers deposited on (a) a-cut, (b) c-cut, and (c) m-cut sapphire substrates.

Fig. 4.  (Color online) (a)–(c) EBSD IPF map, misorientation angle and lattice model of ZnO buffer layers deposited on the a-cut sapphire substrate, respectively. (d)–(f) Those of on the c-cut sapphire substrate. (g)–(i) Those of on the m-cut sapphire substrate.

Fig. 5.  (Color online) Growth models of ZnO buffer layers on various sapphire substrates, provided by the EBSD measurement.

Fig. 6.  SEM images of ZnO nanowires grown on ZnO buffer layers deposited on various sapphire substrates (a) a-cut, (b) c-cut, and (c) m-cut sapphire substrates.

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    Received: 13 October 2015 Revised: Online: Published: 01 February 2016

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      Tetsuya Shimogaki, Masahiro Takahashi, Masaaki Yamasaki, Taichi Fukuda, Mitsuhiro Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, Tatsuo Okada. Catalyst-free growth of ZnO nanowires on various-oriented sapphire substrates by pulsed-laser deposition[J]. Journal of Semiconductors, 2016, 37(2): 023001. doi: 10.1088/1674-4926/37/2/023001 T Shimogaki, M Takahashi, M Yamasaki, T Fukuda, M Higashihata, H Ikenoue, D Nakamura, T Okada. Catalyst-free growth of ZnO nanowires on various-oriented sapphire substrates by pulsed-laser deposition[J]. J. Semicond., 2016, 37(2): 023001. doi:  10.1088/1674-4926/37/2/023001.Export: BibTex EndNote
      Citation:
      Tetsuya Shimogaki, Masahiro Takahashi, Masaaki Yamasaki, Taichi Fukuda, Mitsuhiro Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, Tatsuo Okada. Catalyst-free growth of ZnO nanowires on various-oriented sapphire substrates by pulsed-laser deposition[J]. Journal of Semiconductors, 2016, 37(2): 023001. doi: 10.1088/1674-4926/37/2/023001

      T Shimogaki, M Takahashi, M Yamasaki, T Fukuda, M Higashihata, H Ikenoue, D Nakamura, T Okada. Catalyst-free growth of ZnO nanowires on various-oriented sapphire substrates by pulsed-laser deposition[J]. J. Semicond., 2016, 37(2): 023001. doi:  10.1088/1674-4926/37/2/023001.
      Export: BibTex EndNote

      Catalyst-free growth of ZnO nanowires on various-oriented sapphire substrates by pulsed-laser deposition

      doi: 10.1088/1674-4926/37/2/023001
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      • Corresponding author: Email: shimogaki@laserlab.ees.kyushu-u.ac.jp
      • Received Date: 2015-10-13
      • Published Date: 2016-01-25

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