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Design and fabrication of 1.55μm broad area slotted single-mode Fabry-Perot lasers

Mengke Li, Lijun Yuan, Hongyan Yu, Qiang Kan, Shiyan Li, Junping Mi and Jiaoqing Pan

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 Corresponding author: Pan Jiaoqing, Email:jqpan@semi.ac.cn

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Abstract: We present a single-mode laser on a p-InP substrate suitable for bonding on silicon-on-insulator(SOI) wafer. The laser can realize single mode lasing with etching perturbing slots by standard photolithography and an inductively coupled-plasma(ICP) etching technique without any regrowth steps. The parameters were designed using the simulation tool "cavity modeling framework"(CAMFR). The single mode of 1539 nm wavelength at the threshold current of 130 mA with the maximum output power of 3.9 mW was obtained at 10℃ in continuous-wave operation. The simple technology, low cost and the single-mode characteristics make the broad area slotted single-mode FP laser a promising light source on the silicon-based optical interconnection applications.

Key words: single mode laser1.55μmCAMFRperturbing slots



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Fig. 1.  (Color online) (a) Contour plot of simulated amplitude reflection versus slot width $d_{\rm s}$ and spacing $d_{\rm w}$ with the slot depth of 200 nm. (b) Relative loss versus slot width (duty cycle ff).

Fig. 2.  Calculated amplitude reflection versus the wavelength with the slot width of 1.1 $\mu$m, spacing of 6.2 $\mu$m and slot depth of 300 nm.

Fig. 3.  Three-dimensional schematic structure of the broad area slotted FP laser.

Fig. 4.  SEM images of etching slots.

Fig. 5.  The light output power and voltage versus continuous injection current for the slotted laser at 10 °.

Fig. 6.  The slotted laser output spectrum (a) without and (b) with slots at the continuous injection current of 160 mA at 10 °.

Fig. 7.  Drive current dependence of SMSR from the slotted FP broad area laser at 10 °.

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    Received: 11 June 2015 Revised: Online: Published: 01 March 2016

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      Mengke Li, Lijun Yuan, Hongyan Yu, Qiang Kan, Shiyan Li, Junping Mi, Jiaoqing Pan. Design and fabrication of 1.55μm broad area slotted single-mode Fabry-Perot lasers[J]. Journal of Semiconductors, 2016, 37(3): 034007. doi: 10.1088/1674-4926/37/3/034007 M K Li, L J Yuan, H Y Yu, Q Kan, S Y Li, J P Mi, J Q Pan. Design and fabrication of 1.55μm broad area slotted single-mode Fabry-Perot lasers[J]. J. Semicond., 2016, 37(3): 034007. doi: 10.1088/1674-4926/37/3/034007.Export: BibTex EndNote
      Citation:
      Mengke Li, Lijun Yuan, Hongyan Yu, Qiang Kan, Shiyan Li, Junping Mi, Jiaoqing Pan. Design and fabrication of 1.55μm broad area slotted single-mode Fabry-Perot lasers[J]. Journal of Semiconductors, 2016, 37(3): 034007. doi: 10.1088/1674-4926/37/3/034007

      M K Li, L J Yuan, H Y Yu, Q Kan, S Y Li, J P Mi, J Q Pan. Design and fabrication of 1.55μm broad area slotted single-mode Fabry-Perot lasers[J]. J. Semicond., 2016, 37(3): 034007. doi: 10.1088/1674-4926/37/3/034007.
      Export: BibTex EndNote

      Design and fabrication of 1.55μm broad area slotted single-mode Fabry-Perot lasers

      doi: 10.1088/1674-4926/37/3/034007
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      • Corresponding author: Pan Jiaoqing, Email:jqpan@semi.ac.cn
      • Received Date: 2015-06-11
      • Accepted Date: 2015-10-09
      • Published Date: 2016-01-25

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