Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 558-560

Study of AIGalnP/Si Wafer Bonding

Guo Debo, Liang Meng, Fan Manning, Liu Zhiqiang, Wang Liangchen and Wang Guohong

+ Author Affiliations

PDF

Abstract: Wafer bonding is a new technology for integrating material and a hot issue in the field of optical electronic integration. This paper describes the integration of AIGalnP with Si using a AuSn alloy as a bonding material. From the currentvoltage measurements·it is found that the bonded interfaces do not obstruct the carrier transport.The CROSS-sectional micro-graphs of the joined wafers show that the quality of bonded material is good.Furthermore,the optical reflection measurements reveal that the AuSn alloy works as a reflector,which is a suitable characteristic for the integration of A1GalnP lightemitting devices with Si.

Key words: bondingAIGalnPI-V characteristicsAuSn alloy

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2380 Times PDF downloads: 592 Times Cited by: 0 Times

    History

    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Guo Debo, Liang Meng, Fan Manning, Liu Zhiqiang, Wang Liangchen, Wang Guohong. Study of AIGalnP/Si Wafer Bonding[J]. Journal of Semiconductors, 2007, In Press. Guo D B, Liang M, Fan M N, Liu Z Q, Wang L C, Wang G H. Study of AIGalnP/Si Wafer Bonding[J]. Chin. J. Semicond., 2007, 28(S1): 558.Export: BibTex EndNote
      Citation:
      Guo Debo, Liang Meng, Fan Manning, Liu Zhiqiang, Wang Liangchen, Wang Guohong. Study of AIGalnP/Si Wafer Bonding[J]. Journal of Semiconductors, 2007, In Press.

      Guo D B, Liang M, Fan M N, Liu Z Q, Wang L C, Wang G H. Study of AIGalnP/Si Wafer Bonding[J]. Chin. J. Semicond., 2007, 28(S1): 558.
      Export: BibTex EndNote

      Study of AIGalnP/Si Wafer Bonding

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return