Chin. J. Semicond. > 2007, Volume 28 > Issue 9 > 1454-1458

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A Tunable Micromechanical Capacitor Driven by Electrostatic Force

Fang Dongming, Fu Shi, Zhou Yong and Zhao Xiaolin

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Abstract: A radio frequency (RF) tunable micromechanical capacitor with a high quality factor driven by the electrostatic force was fabricated using simple MEMS technology.The surface profile and the displacement of the variable capacitor at different values of applied voltage are measured by using a WYKO NT1100 optical surface profiler.The measured results show that the pull-in voltage is 13.5V,the tuning ratio of the capacitor is 13.1∶1,and the quality factor and the capacitance are 51.6 and 0.79pF at 1GHz,respectively.

Key words: tunable capacitorRF MEMSquality factor

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    Received: 18 August 2015 Revised: 16 April 2007 Online: Published: 01 September 2007

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      Fang Dongming, Fu Shi, Zhou Yong, Zhao Xiaolin. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Journal of Semiconductors, 2007, In Press. Fang D M, Fu S, Zhou Y, Zhao X L. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Chin. J. Semicond., 2007, 28(9): 1454.Export: BibTex EndNote
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      Fang Dongming, Fu Shi, Zhou Yong, Zhao Xiaolin. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Journal of Semiconductors, 2007, In Press.

      Fang D M, Fu S, Zhou Y, Zhao X L. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Chin. J. Semicond., 2007, 28(9): 1454.
      Export: BibTex EndNote

      A Tunable Micromechanical Capacitor Driven by Electrostatic Force

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      863项目

      • Received Date: 2015-08-18
      • Accepted Date: 2007-03-12
      • Revised Date: 2007-04-16
      • Published Date: 2007-08-31

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