Chin. J. Semicond. > 2002, Volume 23 > Issue 4 > 428-433
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低能电子束照射集成电路芯片时的静态电容衬度分析

冯仁剑 , 张海波 and Katsumi URA

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Key words: 电子照射, 绝缘物带电, 二次电子, 电容衬度, 扫描电镜, 集成电路检测

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(4): 428-433
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      • Received Date: 2015-08-19

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