Chin. J. Semicond. > 2003, Volume 24 > Issue 7 > 687-692

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基于多孔硅牺牲层技术的压阻式加速度传感器的分析和设计(英文)

周俊 , 王晓红 , 姚朋军 , 董良 and 刘理天

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Key words: 加速度传感器, 多孔硅, 微加工, 牺牲层, 微机电系统

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    Received: 20 August 2015 Revised: Online: Published: 01 July 2003

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      • Received Date: 2015-08-20

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