Chin. J. Semicond. > 2003, Volume 24 > Issue 6 > 668-672

CONTENTS

蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究

秦福文 , 顾彪 , 徐茵 and 杨大智

PDF

Key words: 蓝宝石, 清洗, 氮化, RHEED, GaN

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2713 Times PDF downloads: 840 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 June 2003

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Export: BibTex EndNote
      Citation:


      Export: BibTex EndNote

      • Received Date: 2015-08-20

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return