Chin. J. Semicond. > 2005, Volume 26 > Issue 8 > 1514-1518

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Yield Modeling of Rectangular Defect Outline

Wang , Junping , and , Hao and Yue

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Key words: real defectrectangular defect modelcritical areayield modeling

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    History

    Received: 18 August 2015 Revised: Online: Published: 01 August 2005

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      • Received Date: 2015-08-18

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