Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 326-328

PLD Growth of P-Type ZnMgO Films with Li-Doped

Qiu Mingxia, Ye Zhizhen, He Haiping, Gu Xiuquan and Zhu Liping

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Abstract: P-type ZnMgO films grown on glass substrates with Li-doped by pulsed laser deposition.The films have good crystallinity with a(0002)preferential orientation.The substrate temperature exert a remarkable influence oil electrical properties and crystal qualities of Li-doped films.Results indicated that Li-doped ZnMgO film possesses a best crystallinity at the substrate temperature of 500℃.The Li.doped p-type ZnMgO have the lowest resistivity of 6.58Ω·cm,and carrier density up to 5.1 x 10^18cm-3 and Hall mobility 0.189cm2/(V·s).In addition,the Li-doped P.type ZnMgO film has a high transmit. tance about 90%in the visible region and a band gap of 3.625eV at room temperature.

Key words: Li-doped ZnMgO filmspulsed laser depositionp-type conduction

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Qiu Mingxia, Ye Zhizhen, He Haiping, Gu Xiuquan, Zhu Liping. PLD Growth of P-Type ZnMgO Films with Li-Doped[J]. Journal of Semiconductors, 2007, In Press. Qiu M X, Ye Z Z, He H P, Gu X Q, Zhu L P. PLD Growth of P-Type ZnMgO Films with Li-Doped[J]. Chin. J. Semicond., 2007, 28(S1): 326.Export: BibTex EndNote
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      Qiu Mingxia, Ye Zhizhen, He Haiping, Gu Xiuquan, Zhu Liping. PLD Growth of P-Type ZnMgO Films with Li-Doped[J]. Journal of Semiconductors, 2007, In Press.

      Qiu M X, Ye Z Z, He H P, Gu X Q, Zhu L P. PLD Growth of P-Type ZnMgO Films with Li-Doped[J]. Chin. J. Semicond., 2007, 28(S1): 326.
      Export: BibTex EndNote

      PLD Growth of P-Type ZnMgO Films with Li-Doped

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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