Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 407-410

Characteristic of the Recessed-Gate AIGaN/GaN HEMT with a Field Plate

Chen Chen, Chen Tangsheng, Ren Chunjiang and Xue Fangshi

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Abstract: Three kinds of AIGaN/GaN HEMTs have been fabricated:(a) non·recessed HEMT without FP HEMT (b) non· recessed FP HEMT,and(c)recessed FP HEMT.Thought contrast the dynamic I-V and microwave measurement to the three devices,we find that the field plate and gate recess can modulate the field in the channel,then suppress the current collapse and enhanced break-down voltage and improve the output power.A lmm gate width device with this structure exhibited a saturated output power of more than 10W.

Key words: AlGaN/GaNHEMTfield modulating plate gate recess

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Chen Chen, Chen Tangsheng, Ren Chunjiang, Xue Fangshi. Characteristic of the Recessed-Gate AIGaN/GaN HEMT with a Field Plate[J]. Journal of Semiconductors, 2007, In Press. Chen C, Chen T S, Ren C J, Xue F S. Characteristic of the Recessed-Gate AIGaN/GaN HEMT with a Field Plate[J]. Chin. J. Semicond., 2007, 28(S1): 407.Export: BibTex EndNote
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      Chen Chen, Chen Tangsheng, Ren Chunjiang, Xue Fangshi. Characteristic of the Recessed-Gate AIGaN/GaN HEMT with a Field Plate[J]. Journal of Semiconductors, 2007, In Press.

      Chen C, Chen T S, Ren C J, Xue F S. Characteristic of the Recessed-Gate AIGaN/GaN HEMT with a Field Plate[J]. Chin. J. Semicond., 2007, 28(S1): 407.
      Export: BibTex EndNote

      Characteristic of the Recessed-Gate AIGaN/GaN HEMT with a Field Plate

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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