| Citation: |
Kong Jincheng, Kong Lingde, Zhao Jun, Zhang Pengju, Li Hongzhi, Li Xiongjun, Wang Shanli, Ji Rongbin. Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering[J]. Journal of Semiconductors, 2008, In Press.
Kong J C, Kong L D, Zhao J, Zhang P J, Li H Z, Li X J, Wang S L, Ji R B. Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering[J]. J. Semicond., 2008, 29(4): 733.
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Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering
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Abstract
Amorphous HgCdTe(a-HgCdTe or a-MCT) films on glass substrate were deposited by RF magnetron sputtering technology.The amorphous structure of the MCT films were studied by XRD and AFM technology and the "growth window" of a-MCT was obtained.FTIR technology was used to study the optical properties of amorphous MCT films and the absorption coefficient of amorphous MCT films (~8E4cm-1) was obtained.We also observed three absorption regions near the optical gap of amorphous MCT.The optical gap of our a-MCT film is about 0.83eV.-
Keywords:
- amorphous MCT,
- RF magnetron sputtering,
- optical gap
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References
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