Chin. J. Semicond. > 2005, Volume 26 > Issue 11 > 2115-2119

PAPERS

Piezoresistive Effect of Polysilicon Films at High Temperature

Huo Mingxue, Liu Xiaowei, Zhang Dan, Wang Xilian and Song Minghao

+ Author Affiliations

PDF

Abstract: The high-temperature piezoresistive effect of polysilicon films is investigated.The relation between gauge factors of heavy doped polysilicon films deposited by LPCVD and temperatures is researched and attained,considering experimental influences of deposition temperature and film thickness on gauge factors.Polysilicon films with a Boron-doped concentration of about 1e19cm-3 are experimentally studied from room temperature to 560℃.Experimental results show that the polysilicon piezoresistors can work over 560℃.

Key words: piezoresistive effectpolysilicongauge factor

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 3070 Times PDF downloads: 1706 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 November 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Huo Mingxue, Liu Xiaowei, Zhang Dan, Wang Xilian, Song Minghao. Piezoresistive Effect of Polysilicon Films at High Temperature[J]. Journal of Semiconductors, 2005, In Press. Huo M X, Liu X W, Zhang D, Wang X L, Song M H. Piezoresistive Effect of Polysilicon Films at High Temperature[J]. Chin. J. Semicond., 2005, 26(11): 2115.Export: BibTex EndNote
      Citation:
      Huo Mingxue, Liu Xiaowei, Zhang Dan, Wang Xilian, Song Minghao. Piezoresistive Effect of Polysilicon Films at High Temperature[J]. Journal of Semiconductors, 2005, In Press.

      Huo M X, Liu X W, Zhang D, Wang X L, Song M H. Piezoresistive Effect of Polysilicon Films at High Temperature[J]. Chin. J. Semicond., 2005, 26(11): 2115.
      Export: BibTex EndNote

      Piezoresistive Effect of Polysilicon Films at High Temperature

      • Received Date: 2015-08-19

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return