Chin. J. Semicond. > 1993, Volume 14 > Issue 10 > 637-643

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Ti/SiO_2(薄)/Si体系在微量氧存在的氮气中退火过程的研究

李映雪 , 李玉铭 and 李山东

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    Received: 20 August 2015 Revised: Online: Published: 01 October 1993

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      • Received Date: 2015-08-20

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