Chin. J. Semicond. > 1985, Volume 6 > Issue 4 > 429-432

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InP上等离子增强化学汽相淀积SiO_2膜及其MIS结构C-V特性研究

江若琏 , 徐俊明 , 刘青淮 , 王凯 and 郑有炓

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1985

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      • Received Date: 2015-08-20

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