Chin. J. Semicond. > 2001, Volume 22 > Issue 2 > 151-155

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Key words: 聚焦离子束, 集成电路, 刻蚀, 溅射

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2001

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      • Received Date: 2015-08-19

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