Chin. J. Semicond. > 2001, Volume 22 > Issue 12 > 1546-1550

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Key words: 二氧化硅, 光波导, 氢氧焰淀积, 微电子机械系统

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2001

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      • Received Date: 2015-08-20

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