Chin. J. Semicond. > 2006, Volume 27 > Issue 4 > 744-746

PAPERS

Fabrication of Optical Waveguide Devices with UV-Writing Technology

Wu Yuanda, Xia Junlei, An Junming, Li Jianguang, Wang Hongjie and Hu Xiongwei

+ Author Affiliations

PDF

Abstract: The photosensitivity of commercial Si/SiO2 waveguide materials prepared by PECVD is studied.After exposure to high-pressure hydrogen,the as-deposited films are irradiated with excimer-laser pulses operating at 248nm.The change in the induced relative refractive index is about 0.34%.The sectional index distribution of UV-writing waveguides is investigated in detail.Finally,single-mode optical waveguides and Y-splitters are fabricated from silica-based planar optical waveguides with UV-writing technology with a silicon mask.The test results agree with the simulation results.

Key words: UV-writingrefractive indexoptical waveguideoptical splitter

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 3399 Times PDF downloads: 1629 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 April 2006

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Wu Yuanda, Xia Junlei, An Junming, Li Jianguang, Wang Hongjie, Hu Xiongwei. Fabrication of Optical Waveguide Devices with UV-Writing Technology[J]. Journal of Semiconductors, 2006, In Press. Wu Yuanda, Xia J L, An J M, Li J G, Wang H J, Hu X W. Fabrication of Optical Waveguide Devices with UV-Writing Technology[J]. Chin. J. Semicond., 2006, 27(4): 744.Export: BibTex EndNote
      Citation:
      Wu Yuanda, Xia Junlei, An Junming, Li Jianguang, Wang Hongjie, Hu Xiongwei. Fabrication of Optical Waveguide Devices with UV-Writing Technology[J]. Journal of Semiconductors, 2006, In Press.

      Wu Yuanda, Xia J L, An J M, Li J G, Wang H J, Hu X W. Fabrication of Optical Waveguide Devices with UV-Writing Technology[J]. Chin. J. Semicond., 2006, 27(4): 744.
      Export: BibTex EndNote

      Fabrication of Optical Waveguide Devices with UV-Writing Technology

      • Received Date: 2015-08-20

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return