| Citation: |
Song Min, Zheng Yaru, Lu Yongjun, Qu Yanling, Song Limin. Measurements of Optical Characterization for CMOS[J]. Journal of Semiconductors, 2005, In Press.
Song M, Zheng Y R, Lu Y J, Qu Y L, Song L M. Measurements of Optical Characterization for CMOS[J]. Chin. J. Semicond., 2005, 26(12): 2407.
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Measurements of Optical Characterization for CMOS
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Abstract
A new method is introduced for measuring the modulation transfer function (MTF) of CMOS imaging sensors.Experimental arrangements are constructed for the measurement of the MTF and quantum efficiency of CMOS.The MTF and quantum efficiency of a 1024×1024 CMOS imaging sensor are measured,and the results are satisfactory.-
Keywords:
- CMOS,
- modulation transfer function,
- quantum efficiency
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References
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